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Ntinye aka laser ozugbo (DLIP) jikọtara ya na nhazi elu oge nke laser na-ebute (LIPSS) na-enye ohere ịmepụta ebe arụ ọrụ maka ihe dị iche iche.A na-abawanye mmepụta nke usoro ahụ site n'iji ike laser dị elu dị elu.Otú ọ dị, nke a na-eduga ná nchịkọta okpomọkụ, nke na-emetụta ọdịdị siri ike na ọdịdị nke ọdịdị elu ahụ na-esi na ya pụta.Ya mere, ọ dị mkpa iji mụọ n'ụzọ zuru ezu mmetụta nke substrate okpomọkụ na morphology nke ihe ndị e kere eke.N'ime ọmụmụ ihe a, a na-eji ps-DLIP mee akara nchara ahụ na 532 nm.Iji nyochaa mmetụta nke mkpụrụ osisi na-ahụ maka ọdịdị elu, a na-eji efere ọkụ na-achịkwa okpomọkụ.Na-ekpo ọkụ ruo 250 \(^{\circ}\) C mere ka mbelata dị ukwuu na omimi nke ihe owuwu a kpụrụ site na 2.33 ruo 1.06 µm.Ejikọtara mbelata ahụ na mpụta nke ụdị LIPSS dị iche iche dabere na ntụzịaka nke ọka mkpụrụ na oxidation elu nke laser kpatara.Ọmụmụ ihe a na-egosi mmetụta siri ike nke okpomọkụ mkpụrụ, nke a na-atụkwa anya mgbe a na-eme ọgwụgwọ elu na ike laser dị elu iji mepụta mmetụta nchịkọta okpomọkụ.
Usoro ọgwụgwọ elu nke dabeere na ultrashort pulse laser irradiation dị na mbụ nke sayensị na ụlọ ọrụ n'ihi ikike ha imeziwanye ihe ndị dị n'elu nke ihe ndị dị mkpa dị mkpa1.Karịsịa, laser-induced custom surface functionality is a state-of-the-art gafee a dịgasị iche iche nke ulo oru akuku na ngwa ndapụta1,2,3.Dịka ọmụmaatụ, Vercillo et al.Egosiputala ihe mgbochi icing na titanium alloys maka ngwa ikuku nke dabere na superhydrophobicity nke laser kpatara.Epperlein et al kọrọ na njirimara nanosized nke e mepụtara site na nhazi elu laser nwere ike imetụta uto biofilm ma ọ bụ mgbochi na nchara nchara5.Na mgbakwunye, Guai et al.mekwara ka ngwa anya nke mkpụrụ ndụ anyanwụ nke organic.6 Ya mere, nhazi nke laser na-enye ohere ịmepụta ihe nhazi dị elu site na nkwụsị nke ihe dị elu1.
Usoro nhazi nke laser kwesịrị ekwesị maka imepụta ihe owuwu dị n'elu oge a bụ nhazi nnyonye anya laser ozugbo (DLIP).DLIP gbadoro ụkwụ na nnyonye anya dị nso nke oghere laser abụọ ma ọ bụ karịa iji mepụta mbara ala nwere njiri mara na nso micrometer na nanometer.Dabere na ọnụ ọgụgụ na polarization nke ogwe laser, DLIP nwere ike chepụta ma mepụta ụdị elu elu dị iche iche.Ụzọ na-ekwe nkwa bụ ijikọta ihe owuwu DLIP na nhazi elu oge nke laser na-ebute (LIPSS) iji mepụta ọdịdị elu elu nke nwere usoro nhazi dị mgbagwoju anya8,9,10,11,12.N'okike, egosiri na ọkwa ndị a na-enye arụmọrụ dị mma karịa otu ụdịdị13.
Ọrụ LIPSS dị n'okpuru usoro nkwalite onwe ya (nzaghachi ziri ezi) dabere na ngbanwe dị nso na-abawanye nke ikesa ike radieshon.Nke a bụ n'ihi mmụba na nanoroughness dị ka ọnụọgụ laser etinyere na-abawanye 14, 15, 16. Modulation na-eme tumadi n'ihi nnyonye anya nke ebili mmiri na-agbapụta na oghere electromagnetic15,17,18,19,20,21 nke refracted na ihe ndị na-efe efe gbasasịa ma ọ bụ plasmons elu.Nhazi nke LIPSS na-emetụtakwa oge nke pulses22,23.Karịsịa, ike laser dị elu dị elu dị mkpa maka ọgwụgwọ elu arụpụtaghị ihe.Nke a na-achọkarị iji ọnụ ọgụgụ nkwughachi dị elu, ya bụ na oke MHz.N'ihi ya, oge dị anya n'etiti pulses laser dị mkpụmkpụ, nke na-eduga ná mmetụta nchịkọta okpomọkụ 23, 24, 25, 26. Mmetụta a na-eduga n'ịbawanye elu na elu okpomọkụ, nke nwere ike imetụta usoro nhazi nke ọma n'oge ablation laser.
Na ọrụ gara aga, Rudenko et al.na Tzibidis et al.A na-atụle usoro maka ịmepụta ihe owuwu convective, nke kwesịrị ịdịwanye mkpa ka nchịkọta okpomọkụ na-abawanye19,27.Na mgbakwunye, Bauer et al.Gwakọta ọnụ ọgụgụ dị oke egwu nke mkpokọta okpomọkụ na ihe owuwu elu micron.N'agbanyeghi usoro nhazi ihe owuwu a na-ebute okpomọkụ, a na-ekwenyekarị na mmepụta nke usoro a nwere ike imeziwanye nanị site na ịbawanye ọnụego ugboro ugboro28.Ọ bụ ezie na nke a, n'aka nke ya, enweghị ike ime ya na-enweghị mmụba dị ukwuu na nchekwa okpomọkụ.Ya mere, usoro usoro nke na-enye topology multilevel nwere ike ọ gaghị enwe ike ibugharị na ọnụego nkwughachi dị elu na-enweghị ịgbanwe usoro kinetics na nhazi nhazi9,12.N'akụkụ a, ọ dị ezigbo mkpa iji nyochaa ka ọnọdụ okpomọkụ si emetụta usoro nhazi DLIP, karịsịa mgbe ị na-eme usoro nhazi elu n'ihi nhazi nke LIPSS n'otu oge.
Ebumnobi ọmụmụ a bụ iji nyochaa mmetụta okpomọkụ nke mkpụrụ osisi n'elu elu elu na-esi na ya pụta n'oge nhazi DLIP nke igwe anaghị agba nchara site na iji ps pulses.N'oge nhazi laser, a na-ebute okpomọkụ nke ihe nlele ahụ ruo 250 \ (^\circ\) C na-eji efere ọkụ.A na-eji ihe nleba anya nke confocal, nyocha microscopy eletrọn, na ihe nleba anya X-ray na-agbasa ike.
N'ime usoro nnwale nke mbụ, a na-ahazi mkpụrụ nchara ahụ site na iji nhazi DLIP nwere oghere abụọ nwere oge oghere nke 4.5 µm yana ọnọdụ okpomọkụ nke \(T_{\mathrm {s}}\) 21 \(^{\circuit). }\)C, nke a ga-emesịa na-ezo aka dị ka "elu ọkụ adịghị ọkụ".N'okwu a, pulse overlap \(o_{\mathrm {p}}\) bụ ebe dị anya n'etiti pulse abụọ dị ka ọrụ nke nha ntụpọ.Ọ dị iche site na 99.0% (100 pulses kwa ọnọdụ) ruo 99.67% (300 pulses kwa ọnọdụ).N'ọnọdụ niile, a na-eji njupụta ike kachasị elu \ (\Phi _ \ mathrm {p} \) = 0.5 J/cm \ (^ 2 \) (maka Gaussian dakọtara na-enweghị nnyonye anya) na ugboro ugboro f = 200 kHz.Ntuziaka nke polarization nke laser beam na-ejikọta na mmegharị nke tebụl nhazi (Fig 1a)), nke dị na ntụziaka nke geometry linear nke e mere site na ụkpụrụ ntinye aka abụọ.Foto ndị nnọchite anya nke ụlọ enwetara site na iji nyocha eletrọnịkị (SEM) ka egosiri na fig.1 a–c.Iji kwado nyocha nke ihe oyiyi SEM n'ihe gbasara topography, Fourier transforms (FFTs, nke egosipụtara na insets gbara ọchịchịrị) na-eme na ihe ndị a na-enyocha.N'ọnọdụ niile, a na-ahụ ihe geometry DLIP nke nwere ogologo oge nke 4.5µm.
Maka ikpe \ (o_{\mathrm {p}}\) = 99.0% na mpaghara gbara ọchịchịrị nke fig.1a, kwekọrọ na ọnọdụ nke nnyonye anya kacha, mmadụ nwere ike ịhụ oghere nwere obere ihe ndị yiri ya.Ha na-eji eriri na-egbuke egbuke kpuchiri n'ụdị nanoparticle dị ka ọdịdị elu.N'ihi na ihe owuwu dị n'etiti grooves na-egosi na ọ bụ perpendicular na polarization nke laser beam ma nwee oge nke \ (\Lambda _{\mathrm {LSFL-I}} \) 418 \ (\pm 65 \) nm, dị ntakịrị. Ihe na-erughị ogologo ogologo nke laser \ (\lambda \) (532 nm) nwere ike ịkpọ LIPSS na obere oghere oghere (LSFL-I) 15,18.LSFL-I na-emepụta ihe a na-akpọ s-ụdị mgbaàmà na FFT, "s" mgbasa15,20.Ya mere, mgbama ahụ bụ perpendicular na ihe siri ike nke etiti kwụ ọtọ, nke n'aka nke ya na-emepụta site na nhazi DLIP (\(\Lambda _{\mathrm {DLIP}}\) \(\approx\) 4.5 µm).A na-akpọ akara ngosi nke usoro ahịrị ahịrị nke ụkpụrụ DLIP dị na foto FFT dị ka "ụdị DLIP".
Ihe onyonyo SEM nke ihe owuwu elu emebere site na iji DLIP.Njupụta ume kachasị elu bụ \ (\Phi _ \ mathrm {p} \) = 0.5 J/cm \ (^ 2 \) (maka ụda Gaussian enweghị mkpọtụ) yana ọnụego nkwughachi f = 200 kHz.Onyonyo a na-egosi ọnọdụ okpomọkụ, polarization na ihe mkpuchi.Ntugharị nke mpaghara mpaghara ka ejiri akụ ojii akara na (a).Ihe ntinye ojii na-egosi FFT kwekọrọ na 37.25 \ (\ times \) 37.25 µm SEM oyiyi (gosiri ruo mgbe ebili mmiri na-aghọ \ (\vec {k}\cdot (2\pi)^ {-1} \) = 200 nm).A na-egosipụta parampat usoro na ọnụ ọgụgụ ọ bụla.
N'ileghachi anya na foto 1, ị ga-ahụ na ka \(o_{\mathrm {p}}\) na-abawanye, mgbama sigmoid na-etinyekwu uche na axis x nke FFT.Ndị ọzọ nke LSFL-I na-adị ka nke ọzọ.Na mgbakwunye, ike ike nke ụdị s-ụdị mgbaama na ike nke ụdị DLIP mụbara.Nke a bụ n'ihi na a na-akpọkarị trenches nwere ndakọ karịa.Ọzọkwa, akara x-axis n'etiti ụdị s na etiti ga-esi na nhazi nwere otu nghazi ahụ dị ka LSFL-I mana ọ nwere ogologo oge (\(\Lambda _\mathrm {b}\) \(\approx \ ) 1.4 ± 0.2 µm) dị ka egosiri na foto 1c).Ya mere, a na-eche na nhazi ha bụ ihe atụ nke olulu dị n'etiti trenchi.Njirimara ọhụrụ a na-apụtakwa n'ogo dị elu (nnukwu ebili mmiri) nke ordinate.Mgbama na-abịa site na mkpọda mkpọda trenchi ahụ, o yikarịrị ka ọ bụ n'ihi nnyonye anya nke mere na ìhè na-atụgharị n'ihu na mkpọda ugwu9,14.N'ime ndị na-esonụ, LSFL \ (_ \ mathrm {edge} \) na-egosi ripples ndị a, yana akara ha - site n'ụdị -s \ (_ {\mathrm {p)) \).
Na nnwale ọzọ, a na-ebute okpomọkụ nke ihe nlele ahụ ruo 250 Celsius C n'okpuru ebe a na-akpọ "ọkụ".A na-eme nhazi dịka usoro nhazi ahụ si dị ka nyocha ndị a kpọtụrụ aha na ngalaba gara aga (Fig 1a-1c).Onyonyo SEM na-egosi ọdịdị elu ala nke ga-apụta dị ka egosiri na Fig. 1d–f.Ịkpọ ihe nlele ahụ na 250 C na-eduga n'ịbawanye ọdịdị nke LSFL, ntụziaka ya na-ejikọta na polarization laser.Enwere ike ịkọwa ihe owuwu ndị a dị ka LSFL-II ma nwee oge oghere (\Lambda _\mathrm {LSFL-II}\) nke 247 ± 35 nm.Egosighị akara ngosi LSFL-II na FFT n'ihi oke ọnọdụ dị elu.Dị ka \ (o_{\mathrm {p}}\) si na 99.0 ruo 99.67 \(\%\) (Fig. 1d-e), obosara nke mpaghara band na-egbuke egbuke mụbara, nke mere ka ọ pụta ìhè DLIP. n'ihi na ihe karịrị elu frequencies.ọnụọgụ ebili mmiri (frequencies dị ala) wee si otú ahụ gbanwee gaa n'etiti FFT.Ahịrị olulu dị na Fig. 1d nwere ike ịbụ ihe mmalite nke ihe a na-akpọ grooves guzobere perpendicular na LSFL-I22,27.Na mgbakwunye, LSFL-II yiri ka ọ dị mkpụmkpụ na nke na-enweghị oge.Rịba ama na nkezi nha nke band na-egbuke egbuke nwere nanograin morphology dị obere na nke a.Ke adianade do, size nkesa nke ndị a nanoparticles tụgharịa si na-erughị achụsasịwo (ma ọ bụ mere ka obere urughuru agglomeration) karịa na-enweghị kpo oku.N'ịdị mma, enwere ike ịlele nke a site n'ịtụle ọnụ ọgụgụ 1a, d ma ọ bụ b, e, n'otu n'otu.
Ka mkpịsị ahụ \(o_{\mathrm {p}}) na-abawanye ruo 99.67% (Fig. 1f), ọdịdị ọdịdị ọdịdị dị iche iche ji nke nta nke nta pụta n'ihi nhụsianya na-apụtawanye ìhè.Otú ọ dị, ndị a grooves na-egosi obere iwu na-erughị omimi karịa na fig. 1c.Ọdịiche dị ala n'etiti ìhè na ebe gbara ọchịchịrị nke onyonyo a na-egosi n'ịdị mma.Nsonaazụ ndị a na-akwadokwa site na mgbaàmà adịghị ike na nke gbasasịa nke FFT ordinate na Fig. 1f ma e jiri ya tụnyere FFT na c.Obere striae na-apụtakwa ìhè na kpo oku mgbe ha na-atụnyere foto 1b na e, nke e mechara kwenye site na confocal microscopy.
Na mgbakwunye na nnwale gara aga, 90 (^{\circ}\) na-atụgharị polarization nke eriri laser, nke mere ka ntụzịaka polarization na-aga n'ihu n'elu ikpo okwu.Na fig.2a-c na-egosi mmalite nke usoro nhazi, \ (o_{\mathrm {p}}\) = 99.0% na enweghị ọkụ (a), kpụ ọkụ n'ọnụ (b) na ọkụ 90 \ (^ {\ circ }\ ) - Ikpe. na polarization na-atụgharị (c).Iji jiri anya nke uche hụ nanotopography nke ihe owuwu ndị ahụ, a na-egosi mpaghara ndị nwere agba agba na fig.2d, n'ọtụtụ buru ibu.
Ihe onyonyo SEM nke ihe owuwu elu emebere site na iji DLIP.Usoro usoro bụ otu ihe ahụ dị na Fig.1.Onyonyo a na-egosi nlere okpomọkụ \(T_s \), polarization na pulse overlap \(o_\mathrm {p}\).Ntinye ojii na-egosikwa mgbanwe Fourier kwekọrọ.Onyonyo dị na (d)-(i) bụ mmụba nke mpaghara akara na (a)-(c).
N'okwu a, enwere ike ịhụ na ihe owuwu ndị dị na mpaghara gbara ọchịchịrị nke Fig. 2b, c na-enwe mmetụta polarization na ya mere a na-akpọ LSFL-II14, 20, 29, 30. N'ụzọ doro anya, nhazi nke LSFL-I na-atụgharịkwa ( Fig. 2g, i), nke enwere ike ịhụ site na nhazi nke ụdị s na FFT kwekọrọ.Oghere bandwit nke oge LSFL-I na-egosi ibu ma e jiri ya tụnyere oge b, a na-atụgharịkwa oke ya gaa n'obere oge na Fig. 2c, dị ka s-ụdị mgbama na-agbasawanye.Ya mere, ndị na-esonụ LSFL spatial oge nwere ike hụrụ na sample na dị iche iche okpomọkụ okpomọkụ: \ (\ Lambda _{\mathrm {LSFL-I}} \) = 418 \ (\ pm 65 \) nm na 21 ^ { \ circ. }\ )C (Fig. 2a), \(\Lambda _{\mathrm {LSFL-I}} \) = 445\(~\pm\) 67 nm na \(\Lambda _{\mathrm {LSFL-II }} \) = 247 ± 35 nm na 250 ° C (Fig 2b) maka s polarization.N'ụzọ megidere nke ahụ, oge oghere nke p-polarization na 250 \ (^ {\circ } \) C hà nhata \ (\Lambda _{\mathrm {LSFL-I)) \) = 390 \ (\pm 55 \). ) nm na \(\ Lambda_{\mathrm{LSFL-II}}\) = 265±35 nm (Fig. 2c).
N'ụzọ doro anya, nsonaazụ na-egosi na naanị site n'ịbawanye okpomọkụ nlele, ọdịdị ọdịdị elu nwere ike gbanwee n'etiti oke abụọ, gụnyere (i) elu nwere nanị ihe LSFL-I na (ii) mpaghara kpuchiri LSFL-II.N'ihi na a na-ejikọta ụdị ụdị LIPSS a n'elu igwe na elu oxide layers, a na-eme nyocha X-ray ume (EDX).Isiokwu 1 na-achịkọta nsonaazụ enwetara.A na-eme mkpebi ọ bụla site na nkezi ma ọ dịkarịa ala anọ n'ime ebe dị iche iche n'elu ihe nlele edoziri.A na-eme nha ndị ahụ n'ụdị ọnọdụ okpomọkụ dị iche iche \(T_\mathrm{s}\) yana ọnọdụ dị iche iche nke elu nlele nwere mpaghara anaghị ahazi ma ọ bụ ahaziri.Nha ahụ nwekwara ozi gbasara ọkwa dị omimi na-adịghị ahụkebe nke dị n'okpuru ebe a wụrụ awụ, mana n'ime omimi ntinye eletrọn nke nyocha EDX.Otú ọ dị, ekwesịrị iburu n'uche na EDX nwere oke na ikike ya iji nyochaa ọdịnaya oxygen, ya mere ụkpụrụ ndị a nwere ike inye naanị nyocha qualitative.
Akụkụ a na-agwọghị nke ihe nlele ahụ egosighi oke ikuku oxygen na okpomọkụ niile na-arụ ọrụ.Mgbe ọgwụgwọ laser gasịrị, ọkwa oxygen mụbara n'ọnọdụ niile31.Ọdịiche dị na nhazi nke elementrị n'etiti ihe nlele abụọ a na-emebeghị ka a tụrụ anya maka ụdị nchara azụmahịa, ma achọpụtara ụkpụrụ carbon dị elu nke ukwuu ma e jiri ya tụnyere mpempe data nke onye nrụpụta maka igwe AISI 304 n'ihi mmetọ hydrocarbon32.
Tupu atụle ihe ndị nwere ike ime maka mbelata nke omimi ablation groove yana ngbanwe site na LSFL-I ruo LSFL-II, a na-eji njupụta ike ike (PSD) na profaịlụ dị elu.
(i) The quasi-abụọ akụkụ normalized ike spectral density (Q2D-PSD) nke elu ka egosiri dị ka SEM oyiyi na Figure 1 na 2. 1 na 2. Ebe ọ bụ na PSD bụ normalized, mbelata nke nchikota mgbaàmà kwesịrị ịbụ. ghọtara dị ka mmụba na akụkụ na-adịgide adịgide (k \ (\ le \) 0.7 µm \ (^ {-1} \), egosighi ya), ntụgharị ire ụtọ.(ii) Profaịlụ elu elu pụtara kwekọrọ.Nlereanya okpomọkụ \(T_s \), overlap \(o_{\mathrm {p}}\), na laser polarization E n'ihe metụtara nghazi \ (\vec {v} \) nke n'ọkwa n'elu ikpo okwu na-egosi na niile plots.
Iji kọwapụta echiche nke onyonyo SEM, nkezi ike ụdịdị dị iche iche ewepụtara site na opekata mpe ihe onyonyo SEM atọ maka oke ọ bụla edobere site n'ịchịkọta densities otu akụkụ (1D) ike spectral densities (PSD) na ntụzịaka x ma ọ bụ y.E gosipụtara eserese kwekọrọ na Fig. 3i na-egosi ngbanwe ugboro ugboro nke mgbaàmà na ntinye aka ya na ụdịdị dị iche iche.
Na fig.3ia, c, e, ọnụ ọgụgụ DLIP na-eto nso \(k_{\mathrm {DLIP}}~=~2\pi\) (4.5 µm)\(^{-1}\) = 1.4 µm \ ( ^{- 1}\) ma ọ bụ harmonics dị elu kwekọrọ ka ihe nkpuchi ahụ na-abawanye \(o_{\mathrm {p))\).Ejikọtara mmụba na njupụta nke isi na mmepe siri ike nke nhazi LRIB.Njupụta nke harmonics dị elu na-abawanye na mkpọda nke mkpọda.Maka ọrụ akụkụ anọ dị ka ịmachi ikpe, ihe dị nso chọrọ ọnụ ọgụgụ kacha ukwuu nke ugboro ugboro.Ya mere, ọnụ ọgụgụ kasị elu gburugburu 1.4 µm \ (^ {-1} \) na PSD na kwekọrọ ekwekọ nwere ike iji dị ka àgwà parameters maka udi nke uzo.
N'ụzọ megidere nke ahụ, dị ka egosiri na Fig. 3 (i) b, d,f, PSD nke ihe nlele ahụ na-ekpo ọkụ na-egosi elu na-esighị ike na nke sara mbara nke nwere obere mgbaàmà na nkwekọ dị iche iche.Na mgbakwunye, na fig.3(i)f na-egosi na mgbaama kwekọrọ ekwekọ nke abụọ ọbụna karịa akara mgbaama.Nke a na-egosipụta usoro DLIP na-adịghị ahụkebe yana nke na-adịchaghị akpọ nke ihe nlele ọkụ (tụnyere \ (T_s \) = 21 \ (^\circ\) C).Akụkụ ọzọ bụ na ka mgbakwụnye \(o_{\mathrm {p}}\) na-abawanye, mgbama LSFL-I na-esi na ya pụta na-atụgharị gaa na ọnụọgụ ebili mmiri pere mpe (ogologo oge).Enwere ike ịkọwa nke a site na mmụba steepụ nke akụkụ nke ọnọdụ DLIP yana mmụba mpaghara metụtara na akụkụ nke ihe omume14,33.N'ịgbaso usoro a, a pụkwara ịkọwa mgbasawanye nke mgbaàmà LSFL-I.Na mgbakwunye na mkpọda ugwu, e nwekwara ebe dị larịị na ala na n'elu crests nke ihe owuwu DLIP, na-enye ohere maka ogologo oge LSFL-I.Maka ihe ndị na-adọrọ adọrọ nke ukwuu, a na-eme atụmatụ oge LSFL-I dị ka:
ebe \(\theta \) bụ akụkụ nke ihe omume, na ndebanye aha s na p na-ezo aka na polarizations dị iche iche33.
Ekwesiri iburu n'uche na ụgbọ elu nke ihe omume maka nhazi DLIP na-adịkarị na mmegharị nke ikpo okwu nhazi, dị ka egosiri na foto 4 (lee akụkụ ihe onwunwe na ụzọ).Ya mere, s-polarization, dị ka a na-achị, bụ ihe yiri mmegharị nke ogbo, na p-polarization bụ perpendicular na ya.Dị ka nha nha.(1), maka s-polarization, a na-atụ anya mgbasa na ngbanwe nke akara LSFL-I kwupụta ọnụ ọgụgụ ebili mmiri dị nta.Nke a bụ n'ihi mmụba na \ (\theta \) na nso angular \ (\theta \ pm delta \ theta \) ka omimi trenchi na-abawanye.Enwere ike ịhụ nke a site n'ịtụle ọnụ ọgụgụ LSFL-I na Fig. 3ia,c,e.
Dị ka nsonaazụ egosiri na fig.1c, LSFL \(_\mathrm {edge}\) na-ahụkwa na PSD kwekọrọ na fig.3ie.Na fig.3ig,h na-egosi PSD maka p-polarization.Ọdịiche dị na ọnụ ọgụgụ DLIP na-apụtawanye ìhè n'etiti ihe nlele ọkụ na enweghị ọkụ.N'okwu a, mgbaàmà sitere na LSFL-I na-ejikọta ya na nkwekọrịta dị elu nke elu DLIP, na-agbakwụnye na mgbama dị nso na lasing wavelength.
Iji kwurịta nsonaazụ ya n'ụzọ zuru ezu karị, na Fig. 3ii na-egosi omimi nhazi na nchikota n'etiti pulses nke DLIP linear elu nkesa na okpomọkụ dị iche iche.Enwetara profaịlụ elu kwụ ọtọ nke elu site na nkezi profaịlụ iri kwụ ọtọ n'otu n'otu gburugburu etiti ihe owuwu DLIP.Maka okpomọkụ ọ bụla etinyere, omimi nke ihe owuwu ahụ na-abawanye site n'ịba ụba nke pulse.Profaịlụ nke ihe nlele ahụ na-ekpo ọkụ na-egosi grooves nwere ọnụ ọgụgụ kacha elu-na-elu (pvp) nke 0.87 µm maka s-polarization na 1.06 µm maka p-polarization.N'ụzọ dị iche, s-polarization na p-polarization nke ihe nlele na-ekpo ọkụ na-egosi pvp nke 1.75 µm na 2.33 µm, n'otu n'otu.A na-egosipụta pvp kwekọrọ na profaịlụ dị elu na fig.3ii.A na-agbakọ nkezi PvP ọ bụla site na nkezi asatọ otu PvP.
Na mgbakwunye, na fig.3iig, h na-egosi nkesa elu p-polarization perpendicular na usoro ntinye na mmegharị uzo.Ntuziaka nke p-polarization nwere mmetụta dị mma na omimi nke oghere ebe ọ na-eme ka pvp dị elu dị elu na 2.33 µm ma e jiri ya tụnyere s-polarization na 1.75 µm pvp.Nke a n'aka nke kwekọrọ na grooves na ije nke n'ọnọdu n'elu ikpo okwu usoro.Enwere ike ịkpata mmetụta a site na obere nhazi n'ihe gbasara s-polarization ma e jiri ya tụnyere ihe gbasara p-polarization (lee Fig. 2f, h), nke a ga-atụle n'ihu na ngalaba na-esote.
Ebumnuche nke mkparịta ụka ahụ bụ ịkọwa mbelata nke omimi nke groove n'ihi mgbanwe na klas LIPS bụ isi (LSFL-I ruo LSFL-II) n'ihe gbasara ụdị ọkụ.Ya mere zaa ajụjụ ndị a:
Iji zaa ajụjụ mbụ, ọ dị mkpa ịtụle usoro ndị na-akpata mbelata nke ablation.Maka otu pulse na ọnọdụ nkịtị, enwere ike ịkọwa omimi nke ablation dị ka:
ebe \(\delta _{\mathrm {E}}\) bụ omimi ntinye ike, \(\Phi\) na \(\Phi _{\mathrm {th}}\) bụ ihe nhịahụ nke absorption na ụda Ablation. ọnụ ụzọ 34 .
Na mgbakọ na mwepụ, omimi nke ntinye ike na-enwe mmetụta multiplicative na omimi nke ablation, ebe mgbanwe nke ike nwere mmetụta logarithmic.N'ihi ya, mgbanwe n'ụzọ dị nro anaghị emetụta \(\Delta z\) ọ bụrụhaala na \(\Phi ~\gg ~Phi _{\mathrm {th}}\).Otú ọ dị, oxidation siri ike (dịka ọmụmaatụ, n'ihi nhazi nke chromium oxide) na-eduga na njikọ Cr-O35 siri ike ma e jiri ya tụnyere Cr-Cr bond, si otú ahụ na-abawanye ọnụ ụzọ ablation.N'ihi ya, \(\Phi ~\gg ~\Phi _{\mathrm {th}}\) enwekwaghị afọ ojuju, nke na-eduga na mbelata ngwa ngwa na omimi ablation na mbelata njupụta ume ike.Tụkwasị na nke ahụ, a maara njikọ dị n'etiti steeti oxidation na oge nke LSFL-II, nke nwere ike ịkọwa site na mgbanwe na nanostructure n'onwe ya na ihe anya anya nke elu nke elu oxidation30,35 kpatara.Ya mere, kpọmkwem nkesa elu nke absorption fluence \ (\ Phi \) bụ n'ihi mgbagwoju anya nke mmekọrịta dị n'etiti oge nhazi na ọkpụrụkpụ nke oyi akwa oxide.Dabere na oge ahụ, nanostructure na-emetụta ikesa nkesa ike na-etinye uche na ya n'ihi mmụba dị nkọ na ubi, mkpali nke plasmons elu, nnyefe ọkụ pụrụ iche ma ọ bụ mgbasa17,19,20,21.Ya mere, \(\Phi \) bụ ike inhomogeneous nso n'elu, na \(\delta _ {E}\) eleghị anya agaghịkwa ekwe omume na otu absorption coefficient \ (\ alpha = \ delta _{\mathrm {opt}} ^ {-1} \approx \delta _{\mathrm {E}}^{-1}\) maka oke elu dị nso.Ebe ọ bụ na ọkpụrụkpụ nke ihe nkiri oxide na-adabere n'ụzọ dị ukwuu na oge siri ike [26], mmetụta nomenclature na-adabere na okpomọkụ nlele.Micrograph ngwa anya egosiri na eserese S1 na ihe mgbakwunye na-egosi mgbanwe na njirimara anya.
Mmetụta ndị a na-akọwatụ omimi trenchi na-emighị emi n'ihe gbasara obere ihe owuwu dị na 1d,e na 2b,c na 3(ii)b,d,f.
A maara LSFL-II ka ọ na-etolite na semiconductor, dielectrics, na ihe ndị nwere ike ịnweta oxidation14,29,30,36,37.N'okwu ikpeazụ, ọkpụrụkpụ nke elu oxide oyi akwa dị mkpa karịsịa30.Nyocha EDX mere kpughere nguzobe nke oxides elu n'elu a haziri ahazi.Ya mere, maka ihe nlele na-ekpo ọkụ na-ekpo ọkụ, ikuku oxygen na-eme ka ọ dị ka ọ na-enye aka na nhazi nke gaseous particles na akụkụ nke ịmepụta oxides elu.Ihe omume abụọ a na-enye aka dị ukwuu na usoro a.N'ụzọ megidere nke ahụ, n'ihi na kpụ ọkụ n'ọnụ samples, metal oxides nke dị iche iche oxidation na-ekwu (SiO \ (_{\mathrm {2}}\), Cr \ (_{\mathrm {n}} \) O \ (_{\mathrm { m}}\ ), Fe\(_{\mathrm {n}}\)O\(_{\mathrm {m}}\), NiO, etc.) doro anya 38 na ihu ọma.Na mgbakwunye na oyi akwa oxide achọrọ, ọnụnọ subwavelength roughness, tumadi elu spatial ugboro LIPSS (HSFL), dị mkpa na-etolite chọrọ subwavelength (d-ụdị) ike modes14,30.Ụdị ike ike LSFL-II ikpeazụ bụ ọrụ nke njupụta HSFL na ọkpụrụkpụ oxide.Ihe kpatara ọnọdụ a bụ nnyonye anya dị anya nke ìhè gbasasịa site na HSFL na ọkụ na-atụgharị n'ime ihe ma na-agbasa n'ime elu dielectric material20,29,30.Ihe onyonyo SEM nke nsọtụ ụkpụrụ elu dị na eserese S2 na ngalaba Ngwa mgbakwunye na-egosi HSFL dịbu adị.Mpaghara a dị n'èzí na-emetụta nke ọma site na mpụta nkesa ike, nke na-enye ohere ịmepụta HSFL.N'ihi symmetry nke ikesa ike, mmetụta a na-ewerekwa ọnọdụ n'akụkụ ntụzịaka nyocha.
Nlere ọkụ ọkụ na-emetụta usoro nhazi LSFL-II n'ọtụtụ ụzọ.N'otu aka ahụ, mmụba nke okpomọkụ sample \(T_\mathrm{s}\) na-enwe mmetụta dị ukwuu n'ọ̀tụ̀tụ̀ siri ike na jụrụ oyi karịa ọkpụrụkpụ nke oyi akwa a wụrụ awụ26.Ya mere, ihe ngosi mmiri mmiri nke ihe nlele na-ekpo ọkụ na-ekpuchi ikuku oxygen ruo ogologo oge.Tụkwasị na nke ahụ, nkwụsi ike na-egbu oge na-enye ohere ịmepụta usoro mgbagwoju anya nke na-eme ka ngwakọta nke oxygen na oxides na mmiri mmiri steel26.Enwere ike igosi nke a site n'iji atụnyere ọkpụrụkpụ nke oyi akwa oxide kpụrụ naanị site na mgbasa (\(\Lambda _\mathrm {diff}=\sqrt{D~\times ~t_\mathrm {s}}~\le ~15\) nm) Oge coagulation kwekọrọ na ya bụ \ (t_\mathrm {s}~\le ~200\) ns, yana ọnụọgụ mgbasa ozi \ (D ~ le \) 10\(^{-5}\) cm\(^ 2 \ )/ s) A hụrụ ọkpụrụkpụ dị elu nke ukwuu ma ọ bụ chọrọ na nhazi LSFL-II30.N'aka nke ọzọ, kpo oku na-emetụtakwa nhazi nke HSFL na ya mere ihe ndị na-agbasasị ihe a chọrọ iji gbanwee n'ime ụdị ụdị ike LSFL-II d.Mkpughe nke nanovoids tọrọ n'okpuru elu na-egosi itinye aka ha na nhazi nke HSFL39.Nrụrụ ndị a nwere ike ịnọchite anya mmalite electromagnetic nke HSFL n'ihi ụkpụrụ ịdị ike nke oge dị elu achọrọ14,17,19,29.Na mgbakwunye, ụdịdị ike ike ndị a emepụtara ka edobere ọnụ ọgụgụ nanovoids19.Ya mere, enwere ike ịkọwa ihe kpatara mmụba nke HSFL site na mgbanwe mgbanwe nke ntụpọ kristal dị ka \ (T_\mathrm{s}\) na-abawanye.
Egosiputara ya n'oge na-adịbeghị anya na ọnụ ọgụgụ jụrụ oyi nke silicon bụ isi ihe dị mkpa maka mmekọ nke interstitial supersaturation ma si otú ahụ maka nchịkọta ntụpọ ntụpọ na nhazi nke dislocations40,41.Molecular dynamics simulations nke dị ọcha ọla egosila na ohere ohere supersaturate n'oge ngwa ngwa recrystallization, na ya mere mkpokọta nke ohere na ọla na-enweta n'otu aka ahụ42,43,44.N'ịgbakwụnye, ọmụmụ nnwale na nso nso a banyere ọlaọcha lekwasịrị anya na usoro e si emepụta oghere na ụyọkọ n'ihi nchịkọta ntụpọ ntụpọ45.Ya mere, mmụba nke okpomọkụ nke sample \ (T_\mathrm {s}) na, N'ihi ya, mbelata nke jụrụ oyi ọnụego nwere ike imetụta e guzobere voids, nke bụ nuclei nke HSFL.
Ọ bụrụ na ohere bụ ihe dị mkpa na-ebute oghere na ya mere HSFL, ọnọdụ okpomọkụ \ (T_s) kwesịrị inwe mmetụta abụọ.N'otu aka ahụ, \ (T_s \) na-emetụta ọnụ ọgụgụ nke recrystallization na, n'ihi ya, ịta ahụhụ nke ntụpọ ntụpọ (oghere ịta ahụhụ) na kristal toro.N'aka nke ọzọ, ọ na-emetụtakwa ọnụego jụrụ oyi mgbe ọ gbasiri ike, si otú ahụ na-emetụta mgbasa nke ntụpọ ntụpọ na kristal 40,41.Tụkwasị na nke ahụ, ọnụ ọgụgụ siri ike na-adabere na nghazi crystallographic ma si otú a dị ukwuu anisotropic, dị ka mgbasa nke ntụpọ ntụpọ42,43.Dị ka ebe a si kwuo, n'ihi nzaghachi anisotropic nke ihe ahụ, mmekọrịta nke ìhè na ihe na-aghọ anisotropic, nke n'aka nke ya na-eme ka ntọhapụ nke oge a na-ekpebi ike.Maka ihe ndị dị na polycrystalline, omume a nwere ike igbochi oke nke otu ọka.N'ezie, egosiputala nhazi LIPSS dabere na ntụzịaka ọka46,47.Ya mere, mmetụta nke sample okpomọkụ \ (T_s \) na crystallization ọnụego nwere ike ghara ịdị ike dị ka mmetụta nke ọka nghazi.Ya mere, ntụgharị kristal dị iche iche nke ọka dị iche iche na-enye nkọwa nwere ike maka mmụba na oghere na nchịkọta HSFL ma ọ bụ LSFL-II, n'otu n'otu.
Iji dokwuo anya ihe mbụ na-egosi echiche a, a na-edepụta ihe ndị a na-emepụta n'ụdị iji kpughee nhazi ọka dị nso n'elu.Ntụnyere ọka na fig.Egosiri S3 na ihe mgbakwunye.Na mgbakwunye, LSFL-I na LSFL-II pụtara n'ìgwè dị iche iche na ihe nlele ọkụ.Nha na geometry nke ụyọkọ ndị a kwekọrọ na nha ọka.
Ọzọkwa, HSFL na-eme naanị n'ụdị dị warara na njupụta njupụta dị ala n'ihi mmalite convective ya19,29,48.Ya mere, na nnwale, nke a nwere ike ime naanị na mpụta nke profaịlụ beam.Ya mere, HSFL hibere n'elu ebe a na-adịghị oxidized ma ọ bụ nke na-adịghị ike, bụ nke pụtara ìhè mgbe a na-atụnyere akụkụ oxide nke ihe nlele a na-agwọ na nke a na-adịghị agwọta (lee tebụl reftab: ọmụmaatụ).Nke a na-akwado echiche bụ na ọ bụ laser na-ebute oyi akwa oxide.
Nyere na nguzobe LIPSS na-adaberekarị n'ọnụọgụ mmụgharị n'ihi nzaghachi n'etiti pulse, HSFLs nwere ike dochie HSFL site n'ụdị buru ibu ka pulse overlap na-abawanye19.HSFL na-adịchaghị adịkarị na-ebute usoro ike ike oge niile (d-mode) achọrọ maka nhazi LSFL-II.Ya mere, dị ka ndakọrịta nke \ (o_\ mathrm {p} \) na-abawanye (lee Fig. 1 si de), oge nke LSFL-II na-ebelata.
Ọmụmụ ihe a nyochara mmetụta nke mkpụrụ osisi n'elu morphology nke laser ahaziri DLIP mebere igwe anaghị agba nchara.Achọpụtara na ikpo ọkụ mkpụrụ sitere na 21 ruo 250 Celsius na-eduga na mbelata nke omimi ablation site na 1.75 ruo 0.87 µm na s-polarization yana site na 2.33 ruo 1.06 µm na p-polarization.Mbelata a bụ n'ihi mgbanwe dị na ụdị LIPSS site na LSFL-I gaa na LSFL-II, nke ejikọtara ya na oyi akwa oxide elu nke laser na-ebute na okpomọkụ dị elu.Tụkwasị na nke ahụ, LSFL-II nwere ike ime ka ọ̀tụ̀tụ̀ mmiri dị elu n'ihi ụbara oxidation.A na-eche na n'ime usoro nkà na ụzụ a nke nwere nnukwu mgbakwụnye ọkụ ọkụ, nkezi ike ike na nkezi ugboro ugboro, a na-ekpebikwa ihe omume LSFL-II site na mgbanwe mgbanwe mgbanwe mgbanwe na-akpata site na ikpo ọkụ sample.A na-eche na mkpokọta LSFL-II bụ n'ihi nhazi nhazi nanovoid na-adabere na ọka, na-eduga na HSFL dị ka ihe mmalite na LSFL-II.Tụkwasị na nke ahụ, a na-amụ mmetụta nke ntụziaka nke polarization na oge nhazi na bandwit nke oge nhazi.Ọ tụgharịrị na p-polarization na-arụ ọrụ nke ọma maka usoro DLIP n'ihe gbasara omimi ablation.N'ozuzu, ọmụmụ ihe a na-ekpughe usoro nhazi usoro iji jikwaa na kwalite ịdị omimi nke ablation DLIP iji mepụta ụkpụrụ elu ahaziri iche.N'ikpeazụ, mgbanwe site na LSFL-I gaa na LSFL-II bụ ọkụ na-ekpo ọkụ na-atụ anya na a na-atụ anya ntakịrị mmụba nke nkwughachi ya na mgbakwụnye pulse mgbe niile n'ihi mmụba okpomọkụ24.Akụkụ ndị a niile metụtara ihe ịma aka na-abịanụ nke ịgbasa usoro DLIP, dịka ọmụmaatụ site na iji sistemu nyocha polygonal49.Iji wedata nzụlite ọkụ, enwere ike ịgbaso atụmatụ ndị a: mee ka ọsọ nyocha nke nyocha polygonal dị elu dị ka o kwere mee, na-eji ohere ntụpọ laser buru ibu, orthogonal na ntụzịaka nyocha, na iji ablation kacha mma.fluence 28. Tụkwasị na nke a, ndị a echiche na-ekwe ka e kere mgbagwoju hierarchical topography maka elu elu functionalization iji DLIP.
N'ime ọmụmụ ihe a, a na-eji efere igwe anaghị agba nchara (X5CrNi18-10, 1.4301, AISI 304) 0.8 mm gbara ọkpụrụkpụ.Iji wepụ ihe ọ bụla na-emerụ emerụ n'elu, a na-eji ethanol sachaa ihe nlele ahụ nke ọma tupu ọgwụgwọ laser (ntụgharị zuru oke nke ethanol \ (\ ge \) 99.9%).
E gosiputara ntọala DLIP na eserese 4. E ji usoro DLIP rụọ ihe nlele nke nwere 12 ps ultrashort pulsed laser source na ogologo ogologo nke 532 nm na oke nkwughachi nke 50 MHz.Nkesa oghere nke ike ọkụ bụ Gaussian.Ngwa anya emebere nke ọma na-enye nhazi interferometric abụọ-beam iji mepụta usoro ahịrị n'ihe nlele ahụ.Igwefoto nwere oghere n'ogologo nke 100 mm na-ebuli ogwe laser abụọ ọzọ n'elu n'akụkụ 6.8 \ (^\circ\), nke na-enye oge oghere ihe dịka 4.5µm.Enwere ike ịchọta ozi ndị ọzọ na nhazi nnwale n'ebe ọzọ50.
Tupu nhazi laser, a na-etinye ihe nlele ahụ na efere ọkụ na okpomọkụ.Edebere okpomọkụ nke efere ọkụ na 21 na 250 Celsius.N'ime nnwale niile, a na-eji ụgbọ elu transverse nke ikuku abịakọrọ na ngwakọta na ngwaọrụ iyuzucha iji gbochie ntụnye uzuzu na ngwa anya.A na-ahazi usoro ogbo x,y iji dobe nlele n'oge nhazi.
Ọsọ nke usoro nhazi ọkwa dịgasị iche site na 66 ruo 200 mm / s iji nweta ndakọrịta n'etiti pulses nke 99.0 ruo 99.67 \ (\% \) n'otu n'otu.N'ọnọdụ niile, a na-edozi ọnụego nkwughachi na 200 kHz, na nkezi ike bụ 4 W, nke nyere ike kwa pulse nke 20 μJ.Dayameta beam ejiri mee ihe na nnwale DLIP bụ ihe dịka 100 µm, na njupụta ike laser kacha pụta bụ 0.5 J/cm (^{2}\).Ngụkọta ike ewepụtara n'otu mpaghara bụ ọnụ ọgụgụ kacha elu nke dabara na 50 J/cm\(^2\) maka \(o_{\mathrm {p}}\) = 99.0 \(%\), 100 J/cm \(^2\) maka \(o_{\mathrm {p))\)=99.5(\%\) na 150 J/cm\(^2\) maka \(o_{ \mathrm {p}}\) ) = 99.67 (\%).Jiri plate \(\lambda\)/2 iji gbanwee polarization nke eriri laser.Maka usoro nke ọ bụla ejiri mee ihe, a na-edobe akụkụ nke ihe dịka 35 × 5 mm (^{2}\) na nlele ahụ.Emere nnwale niile ahaziri n'okpuru ọnọdụ gburugburu iji hụ na ọdabara ụlọ ọrụ mmepụta ihe.
A na-enyocha morphology nke ihe nlele ahụ site na iji microscope confocal nwere mmụba 50x yana mkpebi anya na vetikal nke 170 nm na 3 nm n'otu n'otu.A na-enyocha data topographic ndị anakọtara site na iji ngwanrọ nyocha elu.Wepụ profaịlụ na data ala dị ka ISO 1661051 si dị.
A kọwakwara ihe nlele ahụ site na iji microscope eletrọn na-enyocha na voltaji na-eme ngwa ngwa nke 6.0 kV.A tụlere ihe mejupụtara kemịkalụ dị n'elu ihe nlele ahụ site na iji mgbakwunye ike na-ekesa X-ray spectroscopy (EDS) na voltaji na-eme ngwa ngwa nke 15 kV.Na mgbakwunye, a na-eji microscope anya nke nwere ebumnuche 50x iji chọpụta morphology granular nke microstructure nke ihe atụ. Tupu nke ahụ, a na-edepụta ihe atụ ndị ahụ na okpomọkụ nke 50 \ (^\circ\) C mgbe niile maka nkeji ise na nchara igwe anaghị agba nchara na hydrochloric acid na nitric acid ntinye nke 15-20 \ (\% \) na 1 \ (. - <\) 5 (\% \), n'otu n'otu. Tupu nke ahụ, a na-edepụta ihe atụ ndị ahụ na okpomọkụ nke 50 \ (^\circ\) C mgbe niile maka nkeji ise na nchara igwe anaghị agba nchara na hydrochloric acid na nitric acid ntinye nke 15-20 \ (\% \) na 1 \ (. - <\) 5 (\% \), n'otu n'otu. Перед эtym obraztsy travyly pry postoyannoy temperature 50 (^\circ\) . зотной кислотами концентрацией 15-20 \(\%\) na 1\( -<\)5 \( \%\) sоответственно. Tupu nke ahụ, a na-edepụta ihe atụ ndị ahụ na okpomọkụ nke 50 \ (^\circ \) C maka nkeji ise na agba igwe anaghị agba nchara na hydrochloric na acid nitric na ntinye nke 15-20 \ (\% \) na 1 \ (. - <\) 5 ( \% \) n'otu n'otu.在此之前，样品在不锈钢染色液中以50 \(^\circ\)C 的恒温蚀刻五分钟，盐酸和硝酸 \(150) \(1) )5 \ (\%\) , ị.在此之前，样品在不锈钢染色液中以50 \(^\circ\)C (\%\)，分别。Tupu nke ahụ, a na-achịkọta ihe nlele ahụ maka nkeji ise na okpomọkụ mgbe niile nke 50 \ (^\circ \) C na ngwọta ntụpọ maka igwe anaghị agba nchara na ntinye nke hydrochloric na acid nitric 15-20 \ (\% \) na 1. \.(-<\)5 \ (\%\) соответственно. (-<\)5 \ (\%\) n'otu n'otu.
Eserese eserese nke nhazi nnwale nke nrụnye DLIP nwere oghere abụọ, gụnyere (1) beam laser, (2) a \(\lambda\)/2 efere, (3) isi DLIP nwere ụfọdụ nhazi ngwa anya, (4) ) efere na-ekpo ọkụ, (5) cross-fluidic , (6) x, y nhazi ọkwa na (7) igwe anaghị agba nchara.Ibe abụọ kpuchiri elu, gbara ya gburugburu na-acha uhie uhie n'aka ekpe, mepụta usoro ahịrị n'akụkụ ihe nlele na akụkụ \(2\theta) (gụnyere ma s- na p-polarization).
Ihe ndekọ data ejiri na/ma ọ bụ nyochaa n'ime ọmụmụ ihe ugbu a dị site n'aka ndị edemede dị iche iche na arịrịọ ezi uche dị na ya.
Oge nzipu: Jan-07-2023